Shinko Electric Co 199909010001 Communication Modem Controller User Manual System Operation Manual

Shinko Electric Co Ltd Communication Modem Controller System Operation Manual

System Operation Manual

FCC ID : OPO199909010001 KEN72-36961 CONFIDENTIAL“SELOHT SOHT-300”SYSTEM OPERATION MANUALofSHINKO OHT SYSTEM
FCC ID : OPO199909010001 KEN72-36962Table of contentsSAFETY PRECAUTIONS...............................................................................................................................................31.GENERAL......................................................................................................................................................................71.1 APPLICATION ............................................................................................................................................................71.2 RELATED SEMI DOCUMENT .....................................................................................................................................71.3 RELATED RULES, LAWS............................................................................................................................................71.4 ABBREVIATIONS........................................................................................................................................................72. OUTLINE OF OHT SYSTEM.....................................................................................................................................82.1 CONSTRUCTION OF OHT SYSTEM .............................................................................................................................92.2 NON-CONTACT POWER SUPPLY ...............................................................................................................................112.3 FCC RULES.............................................................................................................................................................123 SPECIFICATION........................................................................................................................................................143.1 GENERAL CONDITION ......................................................................................................................................143.2 SYSTEM COMPONENT AND CONSTRUCTION.............................................................................................................184. TRANSPORTATION CONTROL............................................................................................................................235. ERROR HANDLING .................................................................................................................................................245.1 GENERAL ................................................................................................................................................................245.2 ERROR HANDLING ...................................................................................................................................................255.3 RECOVERY PROCEDURE IN CASE OF HEAVY ERROR OF A VEHICLE ..........................................................................286. RELATED DOCUMENTS.........................................................................................................................................29
FCC ID : OPO199909010001 KEN72-36963 Safety precautions(1) General Prior to using this product, make sure the “Safety Precautions”, MaintenanceInstruction Manual and other attached documents shall be well read and understoodfor appropriate application. Engage specialists in electrical works. Don’t improve the product by yourselves. Be sufficiently proficient with the equipment, the relevant safety knowledge and theprecautions prior to using this product.In the content of this “Safety Precautions”, items which need to be cautions of out shallbe classified into “Danger” and “Warning”.(2) Definitions of Danger and Warning[Note 1] Medium degree of injuries or light injuries refers to injuries, e.g., burnsand electric shock, which do not require hospitalization of or prolonged hospital visit by the victims. As material losses refers to expanded losses pertaining tothe damage of property and equipment.Note that, depending on the situation, the events described under “Warning” may alsoresult in severe outcome. In either case, make sure that the advice is followed.After reading, make sure this information shall be kept at places where it can always beread by users.
FCC ID : OPO199909010001 KEN72-36964(3) Precautions on use Danger Follow the following advice strictly to avoid electric shock or burns. 1. Don’t enter the operation area of the vehicle. Work on the ladder may collide to the vehicle and may cause injury. 2. Don’t touch the vehicle on the track when Power Supply Panel output the power. 3. Don’t touch the moving parts of the vehicle while it is in operation. Doing so may cause injuries. 4. Don’t touch and Teaching and maintenance shall be done by a qualified person. 5. Make sure the earth terminals for the relate equipment shall be grounded. Not doing so may cause electric shock. 6. Don’t break the cable, impose excessive stress, place heavy weights, or pinch it between items. Doing so may cause electric shock. Warning Don’t use the equipment at locations where water, corrosive atmosphere, orflammable gas is present, or beside flammable items. Doing so may cause life and fails.
FCC ID : OPO199909010001 KEN72-36965(4) Storage Prohibition1. Don’t store the equipment at locations where it is subject to rain, water hazardous gas or liquid. Mandatory Implementation1. Store the equipment at locations in not subjected to sun shine. Store it at predetermined relative humidity and temperature. 0 50 ,90% RH and below, no dew.(5) Transportation Warning1. Don’t carry in a manner except for designated. Doing so may cause materialesloss or injuries. Mandatory Implementation1. The equipment may be broken when overloaded. Follow the advice of the display on the load.(6) Installation Warning1. Don’t climb on top of the equipment or place heavy items on it. Doing so may cause injuries.2. Don’t block the air inlet and outlet ports or allow foreign particles to enter them. Doing so may cause fire.3. Follow the installation direction strictly as it is so design for dissipation of heat. fails or fire.5. Don’t hit the equipment with strong impact. Doing so may cause equipment fails.(7) Operations
FCC ID : OPO199909010001 KEN72-36966 Mandatory ImplementationInstall an external emergency circuit so that operations can be immediately stoppedand power cut off when required(8) Maintenance and lnspection ProhibitionDon’t engage non-specialist technicians to disassemble and repair the equipment. Danger1. Maintenance of the vehicle shall be done on the ground.2. Switch off the power and wait for 3 minutes or longer before carrying outwiring work or inspection. Not doing so may cause electric shock. (The printed circuit board in the driver applies 300V of high voltage parts)
FCC ID : OPO199909010001 KEN72-369671.General1.1 Application This document describes the operation of OHT Vehicle for “SELOHT SOHT-300”,Shinko OHT(Overhead Hoist Transport) System.1.2 Related SEMI documentFollowing documents are parts of the specification:(1) SEMI E10-0299 (1999) (RAM)(2) SEMI E15.1-0299 (1999) (LOAD PORT)(3) SEMI E30-0998 (1998) (GEM)(4) SEMI Draft 2998 (Future E82-0999 (1999), IBSEM)(5) SEMI E37.1-96 (1996) (HSMS-SS)(6) SEMI E47.1-0299 (1999) (FOUP)(7) SEMI E84-0699 (1999) (Extended P I/O)1.3 Related Rules, Laws (1) FCC Part15 Subpart C (2) FCC Part 181.4 Abbreviations(1) OHT : Overhead Hoist Transport(2) OHV : Overhead Hoist transport Vehicle(3) OHVC : Overhead Hoist Vehicle Controller(4) CMC : Communication Modem Controller
FCC ID : OPO199909010001 KEN72-3696 82. Outline of OHT System Fig. 2.1 System Construction
FCC ID : OPO199909010001 KEN72-369692.1 Construction of OHT systemFig.2.1 shows a typical construction oh Shinko OHT system.As shown in the Fig. , Shinko OHT system is composed from the equipment listedbelow.OHT VehicleOHT TrackPower Supply PanelMaintenance Shifter/lifter,OHVCProcess tool (Stocker)FOUP, etc.(1)OHT VehicleMain device of the system is an OHT Vehicle, which is hung from the OHT track andtravels through the track. OHV has a hoisting mechanism and a FOUP is hoisteddown/up to the port of the process tool.(2)OHT TrackOHT track is supported from the building ceiling, and OHV is hung from the track.OHV travels by the linear motor power and the electricity is supplied from the track sideby non-contact power supply system.(3)Power Supply PanelPower Supply Panel is composed from three portion.(a) Power distribution Panel portionPower source of the facility in the voltage of 208V is connected to the distribution Panelof the Power Supply Panel. And from hear, electric power is distributed to the OHTsystem components (i.e. Power supply portion of this panel, Maintenance shifter/lifter,OHVC. OHVC is operated in A.C.120 V, so voltage is transformed from 208V to 120 Vin this panel.(b) Power Supply portion:Power supply panel generate 8.66kHz Alternative Current for the Non-contact powersupply stem(c) CMC(Communication Modem Controller) portionCommunication between OHT Vehicle and the ground side controller (OHVC) isrealized by power line communication. About 300kHz - 350kHz signals aresuperposed on the power line of non-contact power supply power line.(4) Maintenance Shifter/Lifter
FCC ID : OPO199909010001 KEN72-369610To move in/out the OHT Vehicle to the OHT track, Maintenance Shifter/Lifter is used.(5) OHVC(Overhead Hoist Vehicle Controller)OHVC is a ground side controller which control the OHT Vehicle,(6)Process tool (Stocker)The port of the process tool is normally called load port. The specification of the loadport is defined by SEMI standard.Stocker is a special case of process tool.(7)FOUPSilicon wafers in diameter of 300mm are transferred from the process tool to processtool kept in a specific carrier called FOUP (Front Opening Unified Pod) in the cleanroom. This specification is defined by SEMI standard.(8) Load PortThe port is normally called load port. The specification of the load port is defined bySEMI standard.
FCC ID : OPO199909010001 KEN72-3696112.2 Non-contact power supplyThe principle of non-contact power supply is an electro-magnetic coupling, and it canbe understood as an special style of a transformer, by which electric power is suppliedto the OHV.There is a power cable on the track and alternate current is constantly supplied fromthe power supply panel on the ground (Normally it is 400V A.C and 5kW output).Shinko uses 8.66 kHz of the alternate current for the main power supply. About300kHz and 350kHz signals are superposed on the 8.66 kHz main component forrealizing the communication between OHV and ground controller.Fig. 2.2. is a Cross sectional image of Non-contact power supply.Fig. 2.2 Cross sectional image
FCC ID : OPO199909010001 KEN72-3696 122.3 FCC RulesStructure of Shinko OHT System & FCC RulesFor OHT system, there are two FCC rules to be applied.One is part15 subpart C, Intentional radiator portion is applied.The other is Part 18, Power supply and related components are applied.See fig. 2.3 Fig.2.3 FCC rules and OHT construction
FCC ID : OPO199909010001 KEN72-369613
FCC ID : OPO199909010001 KEN72-3696143 Specification3.1 GENERAL CONDITION3.1.1 Transport carrier(1) Name : 300mm wafer FOUP(2) Type :(3) Manufacturer :(4) Material : Compliant with SEMI E47.1-0299 (1999)(5) Color : Compliant with SEMI E47.1-0299 (1999)(6) Weight : 8.7 kgf (Max., including 25 wafers)(7) Dimension : 430mm (W) x 356 mm (L) x 338 mm (H)(8) Outline shape : Compliant with SEMI E47.1-0299 (1999)3.1.2 Transport unit(1) 1 FOUP / 1 vehicle3.1.3 Transport capacityBased on the simulation.3.1.4 Environment condition(1) Cleanliness : Class 100 (0.2 um)(2) Temperature : 23 Degrees Celsius(3) Humidity : %(4) Corrosive gas : Nil(5) Floor surface : Punching plate(6) Ceiling Material : ULPA filter(7) Ceiling height : 12 feet -(8) Required strength of the ceiling heightRefer to YDM-12075 for Customer specific condition.3.1.5 UtilityUtility requirement is as below. (1) ElectricityAC 208 V, 3 phases, 4 wire 60Hz for Power supply panel( AC120V 1 phase 60Hz for OHVC (UPS) is generated from AC 208 V supplied byCustomer internally)The fluctuation of the voltage must be within +/- 10 %, that of frequency must bewithin +/- 1 Hz.Electric Power Distribution idea is shown on Fig. 3.1.1
FCC ID : OPO199909010001 KEN72-369615(Electric distribution) Fig. 3.1.1 Electric Power Distribution
FCC ID : OPO199909010001 KEN72-3696163.1.6 Total system configurationFig. 3.1.2 System Configuration (1)Fig. 3.1.3 System Configuration (2)
FCC ID : OPO199909010001 KEN72-369617Total system configuration is shown on Fig. 3.1.2 and Fig. 3.1.3.Shinko OHT system does act for Intrabay transportation under the MCS, whetherthe MCS is Shinko made or supplied by other vendors. Because OHVC (Systemcontroller of Shinko OHT) is fully compliant with IBSEM (SEMI E82-0999) scenario,open vendor system can be realized easily.3.1.7 Transport ruleCustomer’s HOST system shall send the transport requests to OHVC based onIBSEM procedure (SEMI E82-0999). Refer to Chap. 7 for transport flow.
FCC ID : OPO199909010001 KEN72-3696183.2 System Component and construction3.2.1 System configuration Table 3.2.1 shows the general condition of the system configuration limitation.ITEM SPECIFICATION REMARKSConfiguration OHVC : 1 unit/ system (=bay)OHV (Vehicle) : 60 units / system (Max.)It is a logical restriction. Powersupply panel shall be designedand supplied separately if morethan six vehicles are introduced.Cover area OHV : within the close loop railTrack length : 100 m – (Length of FeederCable between Power Supply Panel toTrack connection point) / one PowerSupply PanelBy introducing multiple PowerSupply Panel, the track lengthcan be multiplied . (In standarddesign maximum four PowerSupply Panel can be introduced).CommunicationHOST-OHVC : ETHERNET (SEMI E37.1 HSMS-SS)OHVC – OHV : Power line communication (EIA RS232C)Tool - OHV : Photo I/O (SEMI E84)Power SupplyPanel(Normal,5kW)One panel covers the followingcomponentsRail length : 100 m – (Length of FeederCable between Power Supply Panel toTrack connection point)Power supply panel to Rail :100 mOHV (Vehicle) : 6 unitsDistance Between Power SupplyPanel to Rail can be extended ifthe total length of Rail and this isless than 100m.Power SupplyPanel(It is internally considered. But notincluded in this specification. Followingsare the preliminary description)One panel covers the followingcomponentsRail length : 100 m – (Length of FeederCable between Power Supply Panel toTrack connection point)Power supply panel to Rail :100 mOHV (Vehicle) : 18 unitsTable 3.2.1 System configuration
FCC ID : OPO199909010001 KEN72-3696193.2.2 Component outline and quantity restrictionNo Name Q’ty Description1TrackRail 1 A track rail has no electric instrument for controlling the vehiclerunning.Maintenance station (including lifting mechanism) is included inthe rail.2 Powersupplypanel1 Input : Three phase AC 200V ( standard ) or AC400V(Optional)Output : 8.66 kHz (A.C 300 V to 400V, it depends on thedemand), single phase 5 kW, Air cooling3 CMC 1 Communication unit between OHVC and vehiclesEIA RS485, 19.2 kBPS (TX/RX/CS procedure)4 OHVC 1 OHV controllerIBM PC based Personal computerRAID 1 HarddiskOperating System : Microsoft Windows NT 4.0, US version1 OHVC covers only 1 bay (= 1 close loop)5 Vehicle Max. 60 Vehicle with hoist mechanism Driven by LDMMain Controller : One board CPU IBM PC compatibleOperating System : Microsoft MS-DOS6 Tool Max. 60 Load / Unload of a FOUP is done at the Load Port oftools.(Customer’s facility)7 Stocker Max. 10 Load / Unload of a FOUP is done at this stage.(Customer’s facility)Table 3.2.2 Component outline3.2.3 Control System InterfaceNoName Media Protocol Remarks1 OHVC-MCS ETHERNET(10MBPS) HSMS-SS Software scenario is based onIBSEM (SEMI E30.4)2 OHVC-EPLC RS232C /RS485(19200BPS)Original PLC supplier baseMaximum distance : 200m3 OHVC-Vehicle(Via CMC) RS232C /RS485(19200BPS)Original Shinko originalMaximum distance : 200m4 Vehicle-Tool( or stocker) Photo I/O8 bit SEMI E84 Based on SEMITable 3.2.3 System interface
FCC ID : OPO199909010001 KEN72-3696203.2.4 Basic technical specificationITEM SPECIFICATION REMARKSTrack structure One loopDriven method LDM (Linear Direct-currency Motor)Max. payload (kg-F) 10Running speed, at straight (m/s) Max. 1.5Running speed, at curve (m/s) 0.5Running acceleration (m/s2)1.0Hoisting speed (m/s) 1.0Hoisting acceleration (m/s2)1.0Hoist stroke (m) Max. 2.4Carrier position Horizontal X,Y(mm) +/- 1 repeatability Height (mm) +/- 1Vehicle stop Lateral(mm) +/- 30 positioncompensation Rotational (degree) (horizontal space)+/- 10Cleanliness Less than CLASS 100 (0.2um)Track radius (mm/r) 500 (at the center)Carrier vibration 0.5GPower supply to Vehicle Non contact , electro-magnetic couplingCommuni-cation Controller to vehicle Power line communication continuous, all area Vehicle to Load port P I/O (E23, E84)Track & Material Aluminum & Stainless Steel support Cross section of track 270 (W) x 130 (H)Vehiclestructure Frame material Steel(Surface finishing)Stainless steel & aluminum plateAnti flammable plastic Gripper Stainless steel & aluminum plateAnti flammable plastic Weight (kg) 80Outline dimension (mm) 490(W) x 675(L) x 892(H)Power supplypanelINPUT/OUTPUT INPUT : AC208 V (three phase)OUTPUT: (AC300V to 400V) , 8.66kHz, 5kW(Standard)Optional large power unitcan be offered.(Normal one) Outline dimension &structure500(W) x 500(D) x 1600(H)Air-cooling, Steel plate enclosure(Output voltage dependson Demand)Controller Hardware PC/AT compatible Window NT PC(OHVC) Software O/S : Window NT 4.0HOST I/F : IBSEM compatible(based on SEMI E30.4-0699)Communication : HSMS (Ethernet)
FCC ID : OPO199909010001 KEN72-3696213.2.5 Transfer stationThe transfer stations shall be prepared by Customer and be compliant with SEMIE15.1-0998 (1998). The input/output ports of stockers shall also be based on SEMIE15.1-0998(1998) in shape and the height of them shall be mutually discussed.All the center of the Load ports (including stocker I/O ports) shall be correctly underthe center of the OHT track within the predetermined accuracy ( +/- 30mm in lateral,+/- 10 degrees in the horizontal surface). If the Load port is precisely under the track,Shinko OHT vehicle can suddenly start the load/unload operation after the vehicle isstopped, but if the load port position is not precisely under the track, positioncompensation movement is necessary and the total performance might be lowered.All the docking port of Load ports shall be in the direction (i.e. outer side of the loop).P I/O device (based on SEMI E84) will be fixed on the track by Shinko at installationstage based on the document supplied by Customer I advance, and the connection ofthe cables between P I/O and the manufacturing tools shall be done by Customer.3.2.6 Safety considerationFollowing considerations may be supplied by Shinko based on the mutually agreeddiscussion.3.2.6.1 EMO ( Emergency Power OFF)EMO switch is installed on the front surface of Power Supply Panel. By pressing thisbutton, power supply to all the vehicle in that system (generally in the bay) will besuddenly stopped and all the vehicles will be suddenly stopped (stopped within threeseconds at worst).Same function EMO switches can be added to the system optionally. Shinko willsupply the predetermined quantity of EMO switches and the installation (fixing inadequate position) in the bay shall be done by Customer.(Remarks)Fixing position of EMO switch shall be decided by Customer considering the FABoperation. According the SEMI S8 and other standards, the EMO position shall bebetween 81 cm to 165 cm in height if the operators are standing position in work.3.2.6.2 P I/O interlock with manufacturing toolShinko system is fully compliant with SEMI E84 in P I/O hand shaking. If ES(Emergency Stop) signal from Passive side (Manufacturing tool) is activated, hoistingmovement of the corresponding vehicle will be suddenly stopped.3.2.6.3 Estop on VehicleEstop button is installed on each vehicle. By pressing this button, vehicle movement(traveling and hoisting gripping) will be suddenly stopped.3.2.6.4 Envelope sensorEach vehicle has a sensor system monitoring the envelope of its traveling area. Bythis system, obstacles in front of the vehicle is detected and the collision will beavoided. Refer to YDM-11859.
FCC ID : OPO199909010001 KEN72-3696223.2.6.5 Fall protection armEach vehicle has fall protection arms, which tries to protect the FOUP in vehicle andtraveling position falling in the case of FOUP breakage.3.2.6.6 Look down sensorEach vehicle can be optionally added a look down sensor, which detects theobstacles under the vehicle between the load port.(It is under development, not yet completed.)3.2.7 Separation of vehicles and operatorsEven the Shinko system has the safety system offering above, it is strictly expected toCustomer for considering the separation of vehicles and operators, such as addingpartition or doors on the load port , or inhibit the operators moving into the bay.3.2.8 TeachingFor registering the precise load port positions to vehicles, teaching operation isnecessary at the stage of Shinko adjustment work.Refer to KEN72-3644(E) for details.
FCC ID : OPO199909010001 KEN72-3696234. Transportation ControlFig. 4.1 Basic transport flow
FCC ID : OPO199909010001 KEN72-3696245. ERROR HANDLING5.1 General(1) The basic classification and handling is summarized in Table 5.1.(2) When a vehicle was moved by outer power such as operator’s hand, followingrecovery operation is necessary.(2-1) Place all the vehicles on a normal position ( where it is not on branching position,collecting position, etc. In case of OHT there is almost no need for consideration,because the rail is simple loop.). If the moved distance of the vehicle can beneglected small, it is not necessary. In case of moving, in front of the Bar code isrecommended.Name Contents Handling RecoveryHeavyerrorThe vehicle cannotcontinue runningTotal system mode ischanged to PAUSE andall the vehicles stop(1) Recover the error orremove the error devicesuch as removal of theerror vehicle(2) Then change the mode toAutoMediumerrorThe vehicle can re-start by operator’sassist(1) A vehicle can runby himself(2) Recover within 1hourTotal system keeps thesame mode and the faileddevices are stopped(1) Recover the error orremove the error device suchas removal of the errorvehicleLighterrorNo needs foroperator’s assist forre-startTotal system and thefailed device continueError event log is kept inthe OHVC Table 5.1 Error group
FCC ID : OPO199909010001 KEN72-3696 255.2 Error handlingError handling procedure is summarized in Table 5.2.1 and 5.2.2Name Device Cause Countermeasure Recovery procedureHeavyError Vehicle -Servo error-Bar code read error-Power unit error-CPU failure-Load /Unload error(1) OHVC1) Mode is moved toPAUSED2) ERROR indication(2) Vehicle (error)1) Emergency stop2) Error reported to OHVC3) Error indication by LED(3) Vehicles (normal)Paused(1) Check and confirm the error cause(2-1) Recovery can be expected soon1) Reset of Vehicle power, Reset of other unit2) OHVC is changed to Auto mode again(2-2) Recovery might be long term1) Remove the error unit such as error vehicle removal2) Cancel the command which cannot be continued3) OHVC is changed to Auto mode againOHVC -OHVC-Vehiclecommunication error-Watch dog of transportcommandOthers Power Supply Panel error (1) Check and confirm the error cause(2) Confirm the vehicle position is OK(3) Restart of the systemMediumError Vehicle Time-over of ObstacleDetection sensor(1) OHVCContinues Auto modeoperation(2) Vehicle (error)Continue operationError report to OHVC(3) Vehicles (normal)Continues normaloperation(1) Check and confirm the error cause(2-1) Recovery can be expected by operator assist1) Recovery by operator such as removal ofobstacles2) Continues the processIn case detect sensor : automatic restart(2-2) Recovery cannot be expected1) Mode changed to PAUSING by OHVC operation2) same with Heavy error recoveryOHVC
FCC ID : OPO199909010001 KEN72-3696 26OTHERS Table 5.2.1
FCC ID : OPO199909010001 KEN72-3696 27Name Device Cause Countermeasure Recovery procedureLightError Vehicle (1) OHVC1) Auto mode operationcontinues2) Event is kept by OHVC(2) Vehicle (error)1) continue normal operation2) Error reported to OHVC(3) Vehicles (normal)Continues normal operation(1) No assist necessary(2) In case of special failure special procedure might bedone (such as Carrier status error, automatictransport to stocker)OHVC - Transport requestrejected- Host communicationerrorOTHERS Table 5.2.2
FCC ID : OPO199909010001 KEN72-3696 285.3 Recovery procedure in case of Heavy error of a vehicleHOST/STC OHVC Vehicle Operator action Fig. 5.3 Error recovery procedure
FCC ID : OPO199909010001 KEN72-3696296. OperationThe documents listed in Table 6.1 are operation manual of components.Regarding the operation of the OHT system, refer to these documents. Table 6.1 Related DocumentsNo Name Document Number Rev. Remarks1 OHT Vehicle Operation Manual KEN72-3699 (E) 02 OHT Teaching Manual KEN72-3644(E) 13 Power Supply Operation Manual YTE7-10024 Operation Manual of OHVC CRP6T3142-01E A5 Remote Control Box OperationManualKEN72-3502(E) 16
FCC ID : OPO199909010001 KEN72-369630Revision Note# Revision Month/Day/Year Contents Author#1 Rev.0 Sept. 3, 1999 The first edition(Preliminary) Masanao Murata

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